JPS6116075Y2 - - Google Patents

Info

Publication number
JPS6116075Y2
JPS6116075Y2 JP12724582U JP12724582U JPS6116075Y2 JP S6116075 Y2 JPS6116075 Y2 JP S6116075Y2 JP 12724582 U JP12724582 U JP 12724582U JP 12724582 U JP12724582 U JP 12724582U JP S6116075 Y2 JPS6116075 Y2 JP S6116075Y2
Authority
JP
Japan
Prior art keywords
suction
valve
pad
hole
valve seat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12724582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5932393U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12724582U priority Critical patent/JPS5932393U/ja
Publication of JPS5932393U publication Critical patent/JPS5932393U/ja
Application granted granted Critical
Publication of JPS6116075Y2 publication Critical patent/JPS6116075Y2/ja
Granted legal-status Critical Current

Links

JP12724582U 1982-08-23 1982-08-23 被加工板材の搬送用吸着パツト Granted JPS5932393U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12724582U JPS5932393U (ja) 1982-08-23 1982-08-23 被加工板材の搬送用吸着パツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12724582U JPS5932393U (ja) 1982-08-23 1982-08-23 被加工板材の搬送用吸着パツト

Publications (2)

Publication Number Publication Date
JPS5932393U JPS5932393U (ja) 1984-02-28
JPS6116075Y2 true JPS6116075Y2 (en]) 1986-05-17

Family

ID=30289067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12724582U Granted JPS5932393U (ja) 1982-08-23 1982-08-23 被加工板材の搬送用吸着パツト

Country Status (1)

Country Link
JP (1) JPS5932393U (en])

Also Published As

Publication number Publication date
JPS5932393U (ja) 1984-02-28

Similar Documents

Publication Publication Date Title
JPS6116075Y2 (en])
JPS6436041A (en) Noncontact wafer transfer mechanism
JP2008087915A (ja) 吸着搬送構造
JPH05305592A (ja) 真空チャック
JPH0342433A (ja) 吸着具
JPH078147Y2 (ja) 吸着装置
JPH0885086A (ja) 真空把持装置
JP3048420B2 (ja) 吸着ハンド
JPH06305675A (ja) バキュウム吸着装置
JPH10249770A (ja) バキュームカップ
JPH01275340A (ja) シート送り出し装置
JPH03232640A (ja) 吸着装置
JPH0471210U (en])
CN119153381A (zh) 一种半导体晶圆片加工翻转机构
JPH0651030Y2 (ja) 小型部品の多数個吸着装置
JPS6016578Y2 (ja) 吸引輸送装置の弁装置
JPS62175362A (ja) 給紙サツカ−の吸口
JPS5871034U (ja) 板材運搬機
JPH0346437U (en])
JPH0621880U (ja) 吸着パット
JPS63190148U (en])
JPH0872704A (ja) 空圧機器の排気弁、呼吸口構造
JPH04217525A (ja) 板状ワークの吸着装置
JPH0711290U (ja) 板材搬送用吸着パッド
JPS62133538U (en])